Sputtering Systems

AJA offers magnetron sputtering systems for research scale physical vapor deposition ranging from compact (ATC Orion Series) to complex (ATC Flagship Series) plus small batch coaters (ATC-B Series). These sputtering systems can be configured in either con-focal, normal incidence, off-axis, glancing angle, or combination of target to substrate orientations. Substrate holder features include radiant heating (1000°C), azimuthal rotation, RF/DC biasing, z-motion, cooling (H2O or LN2), tilting, or planetary motion.